Iso 14644-3.pdf ❲OFFICIAL | Review❳

Guide: ISO 14644-3 — Testing and monitoring to prove continued compliance

Scope & purpose

ISO 14644-3 specifies test methods and procedures to verify that cleanrooms and associated controlled environments meet the requirements defined in ISO 14644-1 (classification by airborne particle concentration) and to support ongoing compliance. It covers acceptance testing and periodic monitoring of installed systems, equipment and control measures.

ISO 14644-3 provides the essential, updated testing methods required to verify cleanroom performance, covering parameters such as airflow, pressure differentials, and filter integrity. This standard, which supersedes the 2005 version, is distinct from classification (Part 1) and monitoring (Part 2) standards, focusing on practical procedures for validation. For more details, visit

• Integrity Tests (Is the barrier intact?)
• Airflow Tests (Is the ventilation strategy working?)
• Interruption Tests (What happens when things go wrong?)

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